The POU3500 program provides dynamic temperature control of the procedure chamber cathode / electrode / anode and might be synchronized with any etch process.
30% of its peak electrical power intake, supplying our shoppers important reduction in operating expenditures and increased reliability.
While using the POU3500, you could obtain unprecedented results in etch general performance, chamber uptime, reduced expense of possession and fab Area utilization – all whilst increasing your method dependability.
Originally Started in 1985, our business has developed right into a identified chief in providing temperature control programs to the worldwide semiconductor marketplace.
LAUDA-Noah will, for just a buyer's retrofit evaluation, observe and alter its fluid temperature Regulate profiles to match an current TCUs' if you want to guarantee a sleek process integration by using DAQ.
We are guided in our perception that prosperity On this competitive marketplace stems from furnishing consumers with hugely engineered new merchandise and world course customer care.
All static TCUs need surplus cooling & heating capacities due to their incredibly huge approach fluid reservoirs. The process fuid reservoir on LAUDA-Noah's dynamic temperature Manage procedure is lower than one gallon.
While using the POU3300, it is possible to reach unprecedented brings about etch performance, chamber uptime, diminished cost of ownership and fab Area utilization – all Noohapou when improving your system dependability.
the info pertains into a 300mm chamber temperature profile through a large component ratio Etch approach, working at pretty large RF ability situations (~three.8kW). The powerful areas of this data set are:
LAUDA-Noah is meeting these new problems and has integrated energy saving technological innovation in methods which can be pleasant on the environment and have a cheap to work.
The TEs' can swap directly from heating to cooling, or visa-versa. they're able to turn on & off even though inside the heating or cooling manner and will boost or reduce the amount of heating or cooling with no switching whatsoever.
More than ever, shrinking system geometries, demanding new procedures as well as a hugely aggressive environment involve temperature Handle devices that Blend speedy and correct temperature control with the emphasis on diminished running prices and improved trustworthiness.
the truth is accurate Dynamic Temperature Management can only be attained when all five (5) of the next program style and installation needs are achieved:
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We know that great products in many cases are the results of good customer feedback and the appliance of ground breaking engineering. We attempt to build benefit for our buyers by way of a system that lets The shopper impact our targets, targets, product or service developments and business procedures.